高靈敏及高分辨KPFM及其相關(guān)技術(shù)

Chapter 1 Introduction
1．1 Preface
1．1．2 Surface Charge
1．1．4 Artifact Induced in The KPFM
1．3 0utline
Chapter 2 Theory of Noncontact Atomic-Force Microscopy
2．1 Preface
2．2 Atomic-Force Microscopy
2．2．4 Principle of The Cantilever
2．3 Applications of SPM in Micro Measurements/Nano
2．3．2 Microelectronics/Nanoelectronics
2．3．4 Manipulation and Spectroscopy
Chapter 3 Kelvin Probe Force Microscopy
3．2 Amplitude Modulation and Frequency Modulation
3．3 Minimum Detectable Contact Potential Difference in AM-and FM-KPFMs
3．4 KPFM in Electrostatic Force Measurements
3．5 Conclusion
Chapter 4 NC-AFM/KPFM Equipment
4．1 Preface
4．3．2 Fiber and Sample Approach Stages
4．3．3 Tube Scanner
4．3．4 Cantilever and Sample Holders
4．3．5 Vibration Isolation System
4．4．1 0ptical Interference Theory
4．4．2 Interferometer Detection
4．5 W-Sputteringlnstrument
……
Chapter 5 Atomic Resolution on Cu(ll0)-0 Surface with NC-AFM
Chapter 6 Clarification of Stray Capacitance Effect with Heterodyne-AM KPFM(HAM-KPEM) at Atomic Resolution
Chapter 7 Phantom Force Elimination Using FM-KPFM without
Feedback at Atomic Resolution
Appendix Ⅰ
Appendix Ⅱ